Optical micropressure transducer

Details Optical micropressure transducer Optical micropressure transducer

G - Physics

01

L

73/58, 349/80

G01L 1/24 (2006.01) G01L 7/08 (2006.01) G01L 9/00 (2006.01) H04R 23/00 (2006.01)

Patent

CA 1321009

OPTICAL MICROPRESSURE TRANSDUCER Abstract of the Disclosure A thin diaphragm receives pressure across one side and faces a beam splitter on the other side. The beam splitter is integrally attached to the diaphragm and serves as a local optical reference plane for the entire assembly. A small cavity is formed between the diaphragm and beam splitter. Coherent light from a light source is partially reflected at the beam splitter. The remainder of the light is reflected from the diaphragm. The reflected beams recombine at a detection point and form an interference pattern. The phase difference between the reflected beams is a function of the amount of deflection of the diaphragm. The interference pattern being indicative of the deflection of the diaphragm is received by a light detector. Optical calibration of the assembly is a function of the distance between the diaphragm and beam splitter which remains as predefined because the beam splitter is integral with the diaphragm. A vent in the small cavity enables the diaphragm to sense small pressures with increased sensitivity. Fiber optics enable use of the assembly in high temperatures. The diaphragm is fabricated by micro-machine techniques to achieve dimensions for the various applications. The micro-dimensioned diaphragm is sensitive to dynamic and static pressure. The measurement of deflection obtained by placing a known load across the diaphragm enables determination of the mechanical properties of the diaphragm material. Detection of the thermal expansion of the unit as well as deflection of the diaphragm enables a sensed pressure measurement as a differential between the detected thermal expansion and deflection.

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