Optical microswitch having electrostatic microactuator and...

H - Electricity – 02 – N

Patent

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Details

H02N 1/00 (2006.01) G02B 6/26 (2006.01) G02B 6/35 (2006.01) G02B 6/42 (2006.01) G02B 26/08 (2006.01) G11B 7/00 (2006.01) G11B 7/135 (2006.01) G11B 11/105 (2006.01) G11B 7/12 (2006.01)

Patent

CA 2318060

An optical microswitch (104) for use with a laser beam that extends along a path comprising a body (213) having an inlet port (150) adapted to receive the laser beam and a plurality of outlet ports (151). A plurality of mirrors (103) coupled to a plurality of micromotors (180a, 180b) are carried by the body. The micromotors selectively move the mirrors from a first position out of the path of the laser beam to a second position into the path of the laser beam to direct the laser beam to one of the outlet ports. Each of the micromotors has at least one electrostatically-driven comb assembly therein for moving the respective mirror to one of the first and second positions. A controller is electrically coupled to the micromotors for providing control signals to the micromotors.

L'invention concerne un microrupteur optique (104) destiné à être utilisé avec un faisceau laser s'étendant le long d'une trajectoire comprenant un corps (213) qui comporte un orifice d'admission (150) adapté pour recevoir le faisceau laser, ainsi que plusieurs orifices de sortie (151). Plusieurs miroirs (103) couplés à plusieurs micromoteurs (180a, 180b) sont disposés sur le corps. Les micromoteurs déplacent sélectivement les miroirs d'une première position hors de la trajectoire du faisceau laser à une deuxième position dans la trajectoire du faisceau laser afin d'orienter le faisceau laser vers un des orifices de sortie. Chaque micromoteur est doté d'au moins un ensemble en peigne à commande électrostatique destiné à déplacer le miroir respectif dans la première ou la deuxième position. Un organe de commande est électriquement couplé aux micromoteurs pour envoyer des signaux de commande aux micromoteurs.

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