Optical microswitch with rotary electrostatic microactuator

G - Physics – 02 – B

Patent

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Details

G02B 26/08 (2006.01) G02B 6/35 (2006.01) H02N 1/00 (2006.01) G11B 7/085 (2006.01) G11B 11/105 (2006.01)

Patent

CA 2356905

An optical microswitch (11) comprising a support body (12) and first and second output fibers (16a, 16b) carried by the body. A rotary electrostatic microactuator (56) is carried by the body and extends in a plane. A micromirror (61) is disposed out of the plane. The microactuator has a mirror holder (103) coupled to the micromirror and at least one comb drive assembly (106) coupled to the mirror holder for driving the micromirror about an axis of rotation (64) extending perpendicular to the plane between a first position for reflecting a laser beam to the first output fiber and a second position for reflecting the laser beam to the second output fiber.

La présente invention concerne un microrupteur optique (11) comprenant un corps de support (12) ainsi que des première et seconde fibres de sortie (16a, 16b) contenues dans ce corps. Un microactionneur électrostatique rotatif (56) porté par ledit corps s'étend dans un plan à l'extérieur duquel est placé un micromiroir (61). Le microactionneur comprend un porte-miroir (103) couplé au micromiroir et au moins un ensemble de commande de peigne (106) couplé au porte-miroir de manière à amener le micromiroir autour d'un axe de rotation (64) s'étendant perpendiculairement au plan, entre une première position permettant de réfléchir un faisceau laser sur la première fibre de sortie, et une seconde position permettant de réfléchir le faisceau laser sur la seconde fibre de sortie.

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