Optical pellicle mounting system

Details Optical pellicle mounting system Optical pellicle mounting system

G - Physics

03

F

G03F 1/14 (2006.01) B29C 65/16 (2006.01) B29C 65/48 (2006.01) H01L 21/02 (2006.01)

Patent

CA 2221906

One aspect of the invention comprises a method of assembling an optical pellicle including a pellicle frame and a pellicle membrane in which adhesive is first applied to the pellicle frame, and then solvent in the adhesive is permitted to evaporate. Normally the step in which solvent is permitted to evaporate involves baking the frame with the adhesive thereon at an elevated temperature. The pellicle membrane is then placed over the adhesive covered frame, and a laser is used to bond the membrane to the frame. An additional, optional step to this process involves application of the laser to the outer edge of the pellicle membrane after the membrane is mounted to the pellicle frame to trim off excess membrane.

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