B - Operations – Transporting – 23 – K
Patent
B - Operations, Transporting
23
K
B23K 26/06 (2006.01) G03F 7/20 (2006.01) H05K 3/00 (2006.01)
Patent
CA 2069813
An optical processing apparatus utilizing multiple reflections of a light beam between a mask and a reflector has improved uniformity in the distribution of the light beam over a surface of the mask. In one form, the reflector is disposed in a face-to-face relation with respect to the mask with an angle of inclination relative thereto. In another form, the reflector has a flat or curved taper surface for decreasing an angle of reflection of the light beam at the mask surface at an initial stage, and a flat surface disposed in parallel with the mask surface. In a further form, the reflector is curved in a direction of transmission of the light beam. In a yet further form, an angle of incidence of the light beam is properly adjusted such that a portion of the light beam, which is first reflected from the mask and escapes outwardly from the reflector, is minimized.
Izumo Masao
Miyamoto Teruo
Myoi Yasuhito
Tanaka Masaaki
Yagi Toshinori
Marks & Clerk
Mitsubishi Denki Kabushiki Kaisha
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