Optical switch and method of making the same

Details Optical switch and method of making the same Optical switch and method of making the same

G - Physics

02

B

G02B 26/08 (2006.01) G02B 6/35 (2006.01)

Patent

CA 2299832

An optical switch a conductive silicon substrate is coated all over the surface area with a silicon film to form in parallel to the substrate surface a movable contact and elastic support portions for coupling the movable electrode and for elastically supporting its movable electrode in a manner to be displaced vertically, the surface region of the conductive silicon substrate facing the movable electrode and the elastic support portions is etched away to form therein a low-floor portion as a fixed electrode surface opposite the movable electrode in parallel thereto, and a micro mirror having a vertical reflecting surface is mounted on the movable electrode portion.

Affiliated with

Also associated with

Rating

Optical switch and method of making the same does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Optical switch and method of making the same, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Optical switch and method of making the same will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFCA-PAI-O-1675976