H - Electricity – 01 – L
Patent
H - Electricity
01
L
H01L 49/02 (2006.01) B23K 26/00 (2006.01) B23K 26/073 (2006.01) H01S 5/06 (2006.01) H01L 21/20 (2006.01)
Patent
CA 2312223
An optical system that controls laser beam spot profile for forming a high performance thin film by a laser heat treatment process is provided. In the optical system that irradiates a rectangular laser beam on a film formed on a substrate, intensity distribution forming means makes the intensity distribution uniform in the longitudinal direction while maintaining the properties of the laser beam 2 such as directivity in the direction of shorter side, thereby making it possible to concentrate the light to a limit permitted by the nature of the laser beam and achieve the maximum intensity gradient on the film disposed on the substrate. Thus a steep temperature distribution can be generated on the film disposed on the substrate and, as a result, high performance thin film can be formed.
Furuta Keisuke
Inoue Mitsuo
Nishimae Junichi
Ogawa Tetsuya
Okamoto Tatsuki
Fetherstonhaugh & Co.
Mitsubishi Denki Kabushiki Kaisha
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