Optical system for optical beam scanning

Details Optical system for optical beam scanning Optical system for optical beam scanning

G - Physics

02

B

G02B 26/10 (2006.01) G01B 11/00 (2006.01) G02B 13/22 (2006.01)

Patent

CA 2240658

The present invention is directed to an optical system for measurement of a three dimensional device. The optical system is designed and configured to meet telecentric and f-.theta. requirements. The system employs primary and secondary mirrors operating in conjunction with a tertiary deflector mounted on a pivot. Light from a light source produces a beam which is deflected off the deflector and the secondary and primary reflectors respectively. The beam is then transmitted to the surface of the object to be measured. Deflection of the tertiary deflector on the pivot results in scanning of the light beam across the surface of the object to be measured.

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