Optical translation measurement

Details Optical translation measurement Optical translation measurement

G - Physics

01

P

G01P 3/36 (2006.01) G01D 5/347 (2006.01) G01P 3/80 (2006.01) G01S 7/481 (2006.01) G01S 17/50 (2006.01) G06F 3/033 (2006.01)

Patent

CA 2322874

A method for determining the relative motion of a surface with respect to a measurement device comprising: illuminating the surface with incident illumination; detecting illumination reflected from the surface to form at least one detected signal; and determining the amount of relative motion parallel to the surface from said at least one detected signal, characterized in that said determining includes correcting for the effects of relative motion perpendicular to the surface.

L'invention concerne un procédé de détermination du mouvement relatif d'une surface par rapport à un dispositif de mesure. Ledit procédé consiste à: éclairer la surface par une illumination incidente; détecter l'illumination réfléchie par la surface de sorte qu'au moins un signal détecté soit formé et déterminer l'ampleur du mouvement relatif parallèle à la surface, à partir dudit signal détecté. Ladite détermination se caractérise en ce qu'elle comprend la correction des effets du mouvement relatif perpendiculaire à la surface.

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