Optical type displacement measuring apparatus

Details Optical type displacement measuring apparatus Optical type displacement measuring apparatus

G - Physics

01

B

354/25, 343/5

G01B 11/24 (2006.01) G01S 17/08 (2006.01)

Patent

CA 1293313

Abstract of the Disclosure: An optical type displacement measuring apparatus according to this invention is furnished with an angle correction conversion table memory which stores therein correctional coefficients corresponding to angle signals expressive of the inclination angles of objects to-be-measured, in addition to a displacement value conversion table memory which stores therein displacement values corresponding to displacement signals, and it further comprises a head scanning unit which moves a head relative to an object to-be-measured, and an arithmetic circuit which drives the head scanning unit and which calculates an angle signal on the basis of displacement values for a plurality of points on the object to-be-measured and corrects the displacement values on the basis of correctional coefficients corresponding to this angle signal, the corrected displacement values being delivered as outputs.

576947

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