Optical waveguide and method for its manufacture

Details Optical waveguide and method for its manufacture Optical waveguide and method for its manufacture

G - Physics

02

B

345/62, 88/97

G02B 6/12 (2006.01) G02B 6/13 (2006.01) G02B 6/134 (2006.01) G02B 6/42 (2006.01) H01L 27/14 (2006.01)

Patent

CA 2013849

An optical waveguide is made by forming a layer of SiO2 on a substrate and implanting a region of the SiO2 layer with Si ions to define a region containing a stoichiometric excess of Si which defines a region having an elevated refractive index surrounded by a region having a lower refractive index. The resulting optical waveguide is stable at the high temperatures required for many semiconductor processing methods, and is useful for optical interconnection in integrated optical and optoelectronic devices.

Un guide d'ondes optiques est fait par formation d'une couche de SiO2 sur un support et implantation d'ions Si dans un secteur de la couche de SiO2 pour définir un secteur contenant un excès stoechiométrique de Si qui définit un secteur ayant un indice de réfraction élevé entouré d'un secteur ayant un indice de réfraction inférieur. Le guide d'ondes optiques résultant est stable aux hautes températures qu'exigent plusieurs méthodes de traitement des semiconducteurs et est utile pour la liaison optique dans les dispositifs optiques et optoélectroniques intégrés.

Affiliated with

Also associated with

Rating

Optical waveguide and method for its manufacture does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Optical waveguide and method for its manufacture, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Optical waveguide and method for its manufacture will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFCA-PAI-O-1705739