Optical waveguide device and method of producing the same

Details Optical waveguide device and method of producing the same Optical waveguide device and method of producing the same

G - Physics

02

B

G02B 6/122 (2006.01) G02B 6/30 (2006.01) G02B 6/34 (2006.01) G02B 6/42 (2006.01)

Patent

CA 2278826

An optical waveguide device is provided which comprises an optical waveguide chip constructed by forming an optical waveguide embedded in a clad layer and alignment marks on the surface of a silicon single crystal board by the use of the etching technique and film forming technique; a device substrate constructed by forming V grooves and alignment marks on the surface of a silicon single crystal board by the use of the etching technique and film forming technique, the optical waveguide chip and the device substrate being aligned with each other with reference to the respective alignment marks and joined together; and optical fibers fitted and fixed in the V grooves.

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