Optical waveguide grating and method and mask for forming same

Details Optical waveguide grating and method and mask for forming same Optical waveguide grating and method and mask for forming same

G - Physics

02

B

G02B 5/18 (2006.01) G02B 6/02 (2006.01) G02B 6/124 (2006.01) G03F 7/20 (2006.01)

Patent

CA 2381472

An optical waveguide grating is formed in an optical waveguide core and/or in an optical waveguide cladding where an electric field of light propagating in the core is spreading by implanting accelerated ions through a mask to the optical waveguide. The mask has enough thickness to prevent the ions irradiated to the masked parts from reaching the portion where the grating is formed. The acceleration energy of the ions is chosen to make the lateral straggling of the implanted ions in the optical waveguide less than three fourths of the period of the grating, or the acceleration energy is chosen to make all or a part of the implanted ions pass through the portion where the grating is formed.

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