Optical waveguide utilizing a layered structure

Details Optical waveguide utilizing a layered structure Optical waveguide utilizing a layered structure

G - Physics

02

B

88/97.2

G02B 6/10 (2006.01) G02B 6/122 (2006.01)

Patent

CA 1268363

OPTICAL WAVEGUIDE UTILIZING A LAYERED STRUCTURE Abstract A planar silicon dioxide waveguide with low loss for the TE mode has been built on a silicon wafer by separating the waveguide from the substrate with a relatively thin layer of polycrystalline silicon and a layer of silicon dioxide having a combined thickness less than that of the waveguide. The separating layers provide a high antiresonant reflectivity which is operative over a broad range of wavelengths.

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