G - Physics – 03 – B
Patent
G - Physics
03
B
88/98, 88/94.5
G03B 3/10 (2006.01) G02B 27/10 (2006.01) G11B 7/09 (2006.01) G11B 7/135 (2006.01)
Patent
CA 1330495
ABSTRACT: "Opto-electronic focussing-error detection system." An opto-electronic focussing-error detection system is described for detecting a deviation between a radiation-reflecting surface and a plane of focussing of an objective system in an optical imaging system, which detection system comprises a beam-splitting element and a radiation-sensitive detection system arranged behind the beam-splitting element, which detection system com- prises two groups of detectors, of which a first group is associated with a first sub-beam and a second group with a second sub-beam of two sub-beams formed by the beam- splitting element. The beam-splitting element is a com- pound wedge comprising two wedge sections having a common base surface and each having an upper surface situated opposite said base surface, which upper surfaces are inclined relative to each other in the plane of the interface between the two wedge sections, the plane of said interface extending substantially perpendicularly to the base surface and to the upper surfaces and containing the optical axis of the imaging system, and the two groups of detectors are situated on opposite sides of a plane containing the optical axis and extending substantially perpendicularly to the interface.
492137
't Lam Hendrik
Greve Peter F.
Smid Albert
't Lam Hendrik
Fetherstonhaugh & Co.
Greve Peter F.
Philips Electronics N.v.
Smid Albert
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