Opto-electronic system for determining a deviation between...

Details Opto-electronic system for determining a deviation between... Opto-electronic system for determining a deviation between...

G - Physics

03

B

88/94.5

G03B 3/00 (2006.01) G02B 27/16 (2006.01) G11B 7/08 (2006.01)

Patent

CA 1046318

ABSTRACT An opto-electronic system is described for determining a deviation between the actual position of a plane in an optical imaging system and the desired position of said plane. Two auxiliary radiation sources are provided which are shifted in opposite directions relative to the optical axis of the imaging system and two radiation-sensitive detectors which are also shifted in opposite directions relative to the optical axis of the imaging system. Of the set of auxiliary radiation sources and the set of detectors the elements of one set are shifted relative to each other in the direction of the optical axis.

270735

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