Organometallic semiconductor devices

Details Organometallic semiconductor devices Organometallic semiconductor devices

H - Electricity

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H01L 49/00 (2006.01) C23C 16/22 (2006.01) H01L 21/365 (2006.01) H01L 29/161 (2006.01) H01L 51/30 (2006.01)

Patent

CA 1165015

ORGANOMETALLIC SEMICONDUCTOR DEVICES Abstract Organotin semiconductor thin films are deposited on a substrate by plasma deposition of reactive organotin species. Conductivity can be increased by heat-treating organotin semiconductors in a reducing atmosphere at a temperature below the melting point of tin. Organotin semiconductors are rendered conductive by exposure to electron or particle beam.

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