Oscillating micro-mechanical sensor of angular velocity

Details Oscillating micro-mechanical sensor of angular velocity Oscillating micro-mechanical sensor of angular velocity

G - Physics

01

C

G01C 19/5712 (2012.01)

Patent

CA 2586549

The present invention relates to measuring devices used in measuring angular velocity and, more specifically, to oscillating micro-mechanical sensors of angular velocity. In the sensors of angular velocity according to the present invention, at least one pair of electrodes is provided in association with an edge of a seismic mass (1), (9), (10), (20), (30), (31), which pair of electrodes together with the surface of the mass (1), (9), (10), (20), (30), (31) form two capacitances such, that one of the capacitances of the pair of electrodes will increase and the other capacitance of the pair of electrodes will decrease as a function of the angle of rotation in the primary motion of the mass (1), (9), (10), (20), (30), (31). The structure of a sensor of angular velocity according to the present invention enables reliable and efficient measuring particularly in solutions for compact oscillating micro- mechanical sensors of angular velocity.

La présente invention concerne des dispositifs de mesure utilisés dans la mesure de la vitesse angulaire et, plus spécifiquement, des capteurs oscillants micromécaniques de vitesse angulaire. Dans les capteurs de vitesse angulaire selon la présente invention, au moins une paire d~électrodes est prévue en association avec un bord d~une masse sismique (1), (9), (10), (20), (30), (31), laquelle paire d~électrodes forme avec la surface de la masse (1), (9), (10), (20) (30), (31) deux capacités de telle sorte qu~une des capacités de la paire d~électrodes augmente et l~autre capacité de la paire d~électrodes baisse en fonction de l~angle de rotation du mouvement principal de la masse (1), (9), (10), (20), (30), (31). La structure d~un capteur de vitesse angulaire selon la présente invention permet une mesure fiable et efficace, particulièrement dans des solutions pour capteurs oscillants micromécaniques de vitesse angulaire compacts.

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