Overpressure-protected, polysilicon, capacitive differential...

Details Overpressure-protected, polysilicon, capacitive differential... Overpressure-protected, polysilicon, capacitive differential...

G - Physics

01

L

G01L 7/08 (2006.01) G01L 9/00 (2006.01) G01L 9/12 (2006.01)

Patent

CA 2095783

ABSTRACT A capacitive differential pressure sensing device with pressure overrange protection and a method of making the same are described. The device employs a doped polysilicon diaphragm overlying a cavity in a doped single crystal silicon wafer having a port extending into the cavity from the opposite side. The cavity floor serves as an overrange protector.

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