C - Chemistry – Metallurgy – 21 – D
Patent
C - Chemistry, Metallurgy
21
D
C21D 9/08 (2006.01) C23C 8/10 (2006.01) C23C 8/18 (2006.01)
Patent
CA 2067095
ABSTRACT It is a metal oxidation treatment apparatus for carrying out the inactivation treatment of metal tubes used especially in a super high purity gas piping system and an apparatus of super high vacuum. The support part of a support member is made as a tubular form member, and a tapered part is provided on the outer periphery thereof, and further, since a spring is mounted to be displaceable, even if fluctuation is present in the internal diameter of stainless steel tubes, it is possible to let the stainless tubes easily be supported on the support part. Also, even fluctuation of the length is present in the stainless steel tubes, the support member is always pushed to the stainless steel tubes. Oxidative gas diffusing out of the tube to be treated to the outside thereof can be released to the outside of the oxidation treatment furnace without letting it contact to the tube to be treated.
Hayashi Shigeki
Nakahara Fumio
Nakahara Yoshiyuki
Ohmi Tadahiro
Ohta Eiji
Hayashi Shigeki
Marks & Clerk
Nakahara Fumio
Nakahara Yoshiyuki
Ohmi Tadahiro
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