Oxide insulator film having a layered structure

Details Oxide insulator film having a layered structure Oxide insulator film having a layered structure

H - Electricity

01

B

H01B 17/32 (2006.01) H01B 12/06 (2006.01) H01L 39/14 (2006.01)

Patent

CA 2223362

. The invention provides an oxide insulator film having a layered structure comprising at least two layers formed of oxide insulators having temperature properties different from each other. The insulator layers preferably comprise at least one ferroelectric layer.

Le présent brevet vise une pellicule d'isolation contre les oxydes, à structure étagée, composée d'au moins deux couches d'isolants contre les oxydes qui réagissent différemment en fonction de la température. Les couches d'isolants comprennent de préférence au moins une couche de matériau ferroélectrique.

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