Oxide piezoelectric material

C - Chemistry – Metallurgy – 04 – B

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C04B 35/46 (2006.01) C04B 35/48 (2006.01) C04B 35/50 (2006.01) C04B 35/51 (2006.01) H01L 41/187 (2006.01)

Patent

CA 916421

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