C - Chemistry – Metallurgy – 04 – B
Patent
C - Chemistry, Metallurgy
04
B
31/82
C04B 35/46 (2006.01) C04B 35/48 (2006.01) C04B 35/50 (2006.01) C04B 35/51 (2006.01) H01L 41/187 (2006.01)
Patent
CA 916421
Egami Harutoshi
Ichinose Noboru
Tanno Yoshikazu
Yokoyama Katsunori
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