Oxide superconducting thin film

H - Electricity – 01 – L

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117/162, 204/96.

H01L 39/02 (2006.01) C01B 13/14 (2006.01) C23C 14/08 (2006.01) C23C 14/28 (2006.01) H01B 12/06 (2006.01) H01L 39/24 (2006.01)

Patent

CA 2031591

An oxide superconducting thin film formed by laser ablation comprises a matrix formed of c-axis oriented superconducting phases and foreign phases which are different in crystal orientation from the matrix. In order to improve critical current density of the oxide superconducting thin film, preferably selected are such conditions that the size of each superconducting phase in its a-b plane is not more than 0.1 µm in diameter, the size of each superconducting phase along its c-axis direction is equal to the thickness of the oxide superconducting thin film, the foreign phases at least partially pass through the oxide superconducting thin film along the direction of thickness, the size of each foreign phase is at least 0.01 µm and not more than 5 µm in diameter, each foreign phase has an a-axis or a c-axis perpendicularly oriented with respect to the major surface of the oxide superconducting thin film, and the like.

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