Oxime derivatives and the use therof as latent acids

Details Oxime derivatives and the use therof as latent acids Oxime derivatives and the use therof as latent acids

G - Physics

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G03F 7/004 (2006.01) C07C 309/65 (2006.01) C07C 309/67 (2006.01) C07C 309/73 (2006.01) C07C 309/74 (2006.01) C07C 309/75 (2006.01) C07C 381/00 (2006.01) C07D 209/86 (2006.01) C07F 9/09 (2006.01) G02B 5/20 (2006.01)

Patent

CA 2574054

The invention pertain to novel photoacid generator compounds of the formula (I, II or III), Wherein R1 is for example C1-C18alkylsulfonyl or phenylsulfonyl, phenyl-C1-C3alkylsulfonyl, , naphthylsulfonyl, anthracylsulfonyl or phenanthrylsulfonyl, all optionally substituted, or R1 is a group (a, b or c); X1, X2 and X3 independently of each other are O or S; R'1 is e.g. phenylenedisulfonyl, naphthylenedisulfonyl, diphenylenedisulfonyl, or oxydiphenylenedisulfonyl, all optionally substituted; R2 is halogen or C1- C10haloalkyl; X is halogen; Ar1 is for example biphenylyl or fluorenyl, or is substituted naphthyl; Ar'1 is heteroarylene, optionally substituted; R8, R9, R10 and R11 for example are C1-C6alkyl which is unsubstituted or substituted by halogen; or R8, R9 and R10 are phenyl which is unsubstituted or substituted by C1-C4alkyl or halogen; or R10 and R11 together are 1,2-phenylene or C2- C6alkylene which is unsubstituted or substituted by C1-C4alkyl or halogen.

L'invention concerne des composés générateurs photoacides, de formule ci-après (I, II ou III). R1 est par exemple C1-C18alkylsulfonyle or phénylsulfonyle, phényle-C1-C3alkylsulfonyle,, naphtylsulfonyle, anthracylsulfonyle or phénanthrylsulfonyle, tous éventuellement substitués, ou bien R1 est un groupe (a, b ou c); X1, X2 et X3 sont indépendamment O ou S; R'1 est par exemple phénylènedisulfonyle, naphtylènedisulfonyle, diphénylènedisulfonyle, ou oxydiphénylènedisulfonyle, tous éventuellement substitués; R2 est halogène ou C1-C10haloalkyle; X est halogène; Ar1 est par exemple biphénylyle ou fluorényle, ou bien naphtyle substitué; Ar'1 est hétéroarylène, éventuellement substitué; R8, R9, R10 et R11 par exemple sont C1-C6alkyle non substitué ou substitué par halogène ; ou R8, R9 et R10 sont phényle non substitué ou substitué par C1-C4alkyle ou halogène; ou bien R10 et R11 ensemble sont 1,2-phénylène ou C2-C6alkylène non substitué ou substitué par C1-C4alkyle ou halogène.

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