Ozone gas sensor and ozone gas detecting device having ozone...

Details Ozone gas sensor and ozone gas detecting device having ozone... Ozone gas sensor and ozone gas detecting device having ozone...

G - Physics

01

N

324/25

G01N 27/12 (2006.01) G01N 27/404 (2006.01) G01N 33/00 (2006.01)

Patent

CA 1297948

ABSTRACT OF THE DISCLOSURE An ozone gas sensor comprising a film type semiconductor element including a substrate and a semiconductor film consisting of a metallic oxide formed on the substrate, and a layer of silica formed on a surface of the film type semiconductor element. At least one thin film layer of one or a plurality of types selected from metals and metal oxides is interposed between the semiconductor film and the layer of silica.

579613

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