G - Physics – 01 – L
Patent
G - Physics
01
L
G01L 9/00 (2006.01) G01M 3/20 (2006.01) H01J 41/06 (2006.01)
Patent
CA 2045632
Abstract: PARTIAL PRESSURE GAUGE USING A COLD-CATHODE ION SOURCE FOR LEAK DETECTION IN VACUUM SYSTEMS The partial pressure gauge consists of a combination of a magnetically confined cold-cathode discharge for the ionization of the residual gas in a vacuum system (ion source) and the magnetic separation of the ion masses (mass spectrometer). A suitable inhomogeneous magnetic field configuration is instrumental in producing such a discharge that the energy spread of the ions is sufficiently small, which in turn guaran- tees the resolution required for mass separation in partial pressure measurements (for purposes of leak detection). The ions are accel- erated solely within the electric field of the discharge. The special shape of the cold-cathode discharge influences the electric field in such a manner that the energy of the emitted ions is low and remains virtually independent of the potential applied to sustain the dis- charge. Due to the low ion energy a moderate magnetic field suf- fices for the mass separation. Hence, the mass spectrometer and the ion source can be integrated within the same magnetic field assembly.
Balzer Richard Ernst W.
Swabey Ogilvy Renault
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