H - Electricity – 05 – K
Patent
H - Electricity
05
K
H05K 3/40 (2006.01) H01L 23/48 (2006.01) H01L 23/485 (2006.01)
Patent
CA 2554750
Provided are partially etched dielectric films with raised conductive features. Also provided are methods for forming the raised conductive features in the dielectric films, which methods include partially etching the dielectric films.
L'invention porte sur des films diélectriques partiellement décapés, à caractéristiques conductrices améliorées, et sur des procédés de formation desdites caractéristiques dans des films diélectriques, lesdits procédés consistant en leur décapage partiel.
Brunner Dennis M.
Buster David L.
Graff Michael S.
Kreutter Nathan P.
Luebbert Daniel K.
3m Innovative Properties Company
Smart & Biggar
LandOfFree
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