Passivating overcoat bilayer for multilayer reflective...

Details Passivating overcoat bilayer for multilayer reflective... Passivating overcoat bilayer for multilayer reflective...

G - Physics

02

B

G02B 1/10 (2006.01) G02B 5/08 (2006.01) G02B 5/28 (2006.01) G03F 7/20 (2006.01) G21K 1/06 (2006.01)

Patent

CA 2309612

A passivating overcoat bilayer is used for multilayer reflective coatings for extreme ultraviolet (EUV) or soft x-ray applications to prevent oxidation and corrosion of the multilayer coating, thereby improving the EUV optical performance. The overcoat bilayer comprises a layer of silicon or beryllium underneath at least one top layer of an elemental or a compound material that resists oxidation and corrosion. Materials for the top layer include carbon, palladium, carbides, borides, nitrides, and oxides. The thicknesses of the two layers that make up the overcoat bilayer are optimized to produce the highest reflectance at the wavelength range of operation. Protective overcoat systems comprising three or more layers are also possible.

L'invention concerne une double couche supérieure de passivation utilisée sur des revêtements réflecteurs multicouche en vue d'applications d'ultraviolets extrêmes (EUV) ou de rayons X mous afin de prévenir l'oxydation et la corrosion du revêtement multicouche, ce qui améliore les performances optiques EUV. La double couche supérieure comprend une couche de silicium ou béryllium sous au moins une couche supérieure d'un matériau élémentaire ou composé qui résiste à l'oxydation et à la corrosion. On peut utiliser le carbone, le palladium, les carbures, les borures, les azotures et les oxydes comme matériaux pour la couche supérieure. L'épaisseur des deux couches qui forment la double couche supérieure est optimisée pour produire la plus haute réflectance dans des plages de longueurs d'ondes opérationnelles. L'invention concerne aussi des systèmes de couches supérieures de protection comprenant au moins trois couches.

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