Passivation of porous semiconductors

H - Electricity – 01 – L

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H01L 21/47 (2006.01) H01L 21/312 (2006.01) H01L 21/477 (2006.01)

Patent

CA 2340535

A method is disclosed for stabilizing porous silicon. A porous silicon structure having a surface terminated with hydrogen atoms is subjected to organic thermal processing to substitute the hydrogen atoms with a protective organic layer. The resulting structure are found to have unprecedented stability.

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