H - Electricity – 01 – L
Patent
H - Electricity
01
L
H01L 21/47 (2006.01) H01L 21/312 (2006.01) H01L 21/477 (2006.01)
Patent
CA 2340535
A method is disclosed for stabilizing porous silicon. A porous silicon structure having a surface terminated with hydrogen atoms is subjected to organic thermal processing to substitute the hydrogen atoms with a protective organic layer. The resulting structure are found to have unprecedented stability.
Boukherroub Rabah
Lockwood David J.
Morin Sylvie
Wayner Danial D. M.
Marks & Clerk
National Research Council Of Canada
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