Passive temperature compensation technique for mems devices

Details Passive temperature compensation technique for mems devices Passive temperature compensation technique for mems devices

G - Physics

01

C

G01C 19/56 (2006.01) G01P 3/14 (2006.01)

Patent

CA 2484323

A MEMS sensor using a passive temperature compensation technique may provide an uncompensated sense output. Additionally, a circuit coupled to the MEMS sensor may include a diode having a voltage drop. A compensated sense output may be formed by combining the uncompensated sense output with a diode output that is proportional to the voltage drop across the diode.

Dans un mode de réalisation, un capteur micro-électromécanique MEMS mettant en application une technique de correction de température passive peut produire une sortie de détection non corrigée. De plus, un circuit couplé au capteur MEMS peut comporter une diode présentant une chute de tension. Il est possible d'obtenir une sortie de détection corrigée par combinaison de la sortie de détection non corrigée à une sortie de diode proportionnelle à la chute de tension dans cette diode.

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