Pattern forming and transferring processes

Details Pattern forming and transferring processes Pattern forming and transferring processes

G - Physics

03

F

G03F 7/26 (2006.01) G03F 7/004 (2006.01) G03F 7/038 (2006.01) G03F 7/09 (2006.01) G03F 7/32 (2006.01) G03F 7/36 (2006.01)

Patent

CA 2063603

-68- PATTERN FORMING AND TRANSFERRING PROCESSES ABSTRACT OF THE DISCLOSURE Pattern forming and transferring processes using radiation sensitive materials based upon mixtures of polyoxometalates and organic compounds. The processes involve establishing a layer of such radiation sensitive material on one or more layers of underlying materials. A pattern is formed in the layer of radiation sensitive material by exposing selected areas of the layer to radiation. The pattern may then be transferred into the underlying layers of material. Methods for developing patterns in layers of radiation sensitive materials, so as to hinder leaching of etch resistant substances included in the radiation sensitive materials, are also provided, H:\UTFB\386\PA\01 .INT

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