Patterned wafer defect inspection system and method

Details Patterned wafer defect inspection system and method Patterned wafer defect inspection system and method

G - Physics

01

R

G01R 31/308 (2006.01) H01L 21/66 (2006.01)

Patent

CA 2638415

A system for inspecting semiconductor devices is provided. The system includes a region system selecting a plurality of regions from a semiconductor wafer. A golden template system generates a region golden template for each region, such as to allow a die image to be compared to golden templates from a plurality of regions. A group golden template system generates a plurality of group golden templates from the region golden templates, such as to allow the die image to be compared to golden templates from a plurality of group golden templates.

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