G - Physics – 02 – B
Patent
G - Physics
02
B
88/113
G02B 5/10 (2006.01) C03C 17/00 (2006.01) C23C 16/04 (2006.01) C23C 16/455 (2006.01) C23C 16/44 (2006.01)
Patent
CA 2038292
A description is given of a PCVD process for producing an approximately dome-shaped substrate, in particular a reflector having inside dielectric cold- light mirror coating, provided with a dielectric and/or metallic coating system on the inside and/or outside face. Furthermore, particularly suitable apparatuses are described for carrying out the process according to the invention. According to the invention, the thickness of the gas layer to be reacted above the face to be coated is adjusted with the aid of a displacement body so that the extent of the homogeneous reaction ("glass soot formation") occurring in the gas layer during a plasma phase is harmless for the desired coating quality. Strongly domed, large-area substrates of virtually any shape can be provided on their inside and/or outside face with a uniform coating of highest optical quality and also mechanical, thermal and chemical stability without complicated substrate movement by using a PCVD process. If a PPCVD process is used, specified axial and azimuthal coating thickness profiles can be superimposed in a manner known per se by suitably shaping the displacement body.
Etzkorn Heinz-Werner
Krummel Harald
Paquet Volker
Weidmann Gunter
Marks & Clerk
Schott Glaswerke
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