Pellicle

Details Pellicle Pellicle

G - Physics

03

F

95/94.5

G03F 1/14 (2006.01) G03F 7/20 (2006.01)

Patent

CA 1305627

PELLICLE ABSTRACT OF THE DISCLOSURE A pellicle is composed of a pellicle frame, a pellicle film spread on one side face of the pellicle frame, and a tacky substance layer having a high light transmittance formed on the inner side face of the pellicle film.

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