Pellicle compositions and pellicles thereof for projection...

Details Pellicle compositions and pellicles thereof for projection... Pellicle compositions and pellicles thereof for projection...

C - Chemistry, Metallurgy

08

L

95/4, 400/5356

C08L 83/04 (2006.01) G03F 1/00 (2006.01) G03F 1/14 (2006.01)

Patent

CA 1259724

PELLICLE COMPOSITIONS AND PELLICLES THEREOF FOR PROJECTION PRINTING Abstract A pellicle for use in projection printing com- prises a pellicle in which the transparent film is formed from a polyvinyl butyral resin or from a casting composition which is a mixture of a polyvinyl butyral resin and a dispersion of colloidal silica and a sili- cone resin which is a lower aliphatic alcohol-water solution of the partial condensate of a silanol. A pellicle employing such films are useful in the near, mid and deep UV regions.

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