Pellicle, method of preparing the same and exposure method

Details Pellicle, method of preparing the same and exposure method Pellicle, method of preparing the same and exposure method

G - Physics

03

F

G03F 1/14 (2006.01)

Patent

CA 2282924

A pellicle that excellently transmits ultraviolet rays and, particularly, vacuum ultraviolet rays, does not lose the film thickness thereof that stems from the photolysis and, hence, exhibits excellent light resistance. The pellicle is obtained by using, as a material of pellicle film, an impurity-free organic polymer obtained by treating an organic polymer to remove at least a portion of at least any one of, preferably, a majority portion of trace amount-metal components, high molecular components and incomplete molecular structure components contained in the organic polymer. The invention further provides a method of preparing a pellicle.

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