Pellicle packaging and handling system

Details Pellicle packaging and handling system Pellicle packaging and handling system

B - Operations, Transporting

65

D

356/187

B65D 85/38 (2006.01) G03F 1/14 (2006.01) H01L 21/673 (2006.01)

Patent

CA 2026248

23 EL-0252-A ABSTRACT OF THE DISCLOSURE A pellicle packaging and handling system include a pellicle having a transparent pellicle film extending across a peripheral pellicle frame. A pellicle holder releasably grips the pellicle frame to form a holder/pellicle assembly, the pellicle holder being graspable to handle the holder/pellicle assembly and release the pellicle from the holder. The selectively openable enclosure houses the holder/ pellicle assembly with the holder/pellicle assembly releasably retained in a fixed position within the enclosure.

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