Phase measuring scanning optical microscope

Details Phase measuring scanning optical microscope Phase measuring scanning optical microscope

G - Physics

02

B

G02B 21/14 (2006.01) G02B 21/00 (2006.01) G02B 27/46 (2006.01) G02B 27/50 (2006.01)

Patent

CA 2077754

2077754 9107682 PCTABSCORE2 The invention provides for phase measurement in transmission and reflection scanning optical microscopes. In these microscopes a parallel beam of laser (1) light is focused onto a small portion of an object (4). Light from this small portion is imaged via a pinhole (8) onto a single detector (10). The image is built up by scanning the object and recording the output from the detector for each object position. In this invention the phase image is recovered by subsequent processing of two or more amplitude images. One image is measured in the usual way; the other or others are recorded with suitable filters (2, 7) placed in the Fourier or output planes of both the illumination (3) and imaging (6) lenses. The two optical filters (2, 7) have amplitude weighting functions g(x, y) which preferably equal c. exp(ax + by), where a, b and c ar real constants.

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