Photochemical conversion of sio to sio.sub.2

Details Photochemical conversion of sio to sio.sub.2 Photochemical conversion of sio to sio.sub.2

C - Chemistry, Metallurgy

23

C

356/178, 204/91.

C23C 20/08 (2006.01) B01J 19/12 (2006.01) C01B 33/12 (2006.01) C04B 41/50 (2006.01) C04B 41/87 (2006.01) H01L 21/316 (2006.01)

Patent

CA 1225362

PROCESS FOR DEPOSITING METALLIC COPPER Abstract of the Disclosure Metallic copper is deposited on a substrate by a process which involves confining the vapor of a fluorinated organic copper compound in an enclosed chamber containing the substrate, and decomposing the copper compound by means of irradiation with light.

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