Photolithographic patterning of polymeric materials

G - Physics – 03 – F

Patent

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Details

G03F 7/09 (2006.01) G02B 6/10 (2006.01) G02B 6/12 (2006.01) G03F 7/11 (2006.01)

Patent

CA 2597866

The invention comprises methods for the photolithographic patterning of features in a photo-curable polymer composition coated onto a plastic substrate. In one embodiment of this invention, the plastic substrate is coated with a reflective film such as a metallic barrier. In another embodiment, the plastic substrate is coated or co-extruded with a polymer barrier layer containing an additive that absorbs the photo-curing radiation. In yet another embodiment the plastic substrate contains an intrinsic additive that absorbs the photo-curing radiation. Combinations of these embodiments are also within the scope of this invention. The methods of the present invention may be advantageously applied to the fabrication of optical waveguides comprising a photo-curable polymer supported on a plastic substrate, but are applicable to the fabrication of any device or object comprising a photo- curable polymer supported on a plastic substrate.

L~invention comprend des procédés de mise en motifs photolithographique de caractéristiques dans une composition polymère photovulcanisable enduite sur un substrat plastique. Selon un mode de réalisation de la présente invention, le substrat plastique est revêtu d~un film réfléchissant comme une barrière métallique. Selon un autre mode de réalisation, le substrat plastique est enduit ou co-extrudé avec une couche de protection polymère contenant un additif absorbant la radiation de photovulcanisation. Selon un autre mode de réalisation encore, le substrat plastique contient un additif intrinsèque qui absorbe la radiation de photovulcanisation. Des combinaisons de ces modes de réalisation entrent également dans le cadre de la présente invention. Les procédés de la présente invention peuvent être appliqués avantageusement à la fabrication de guides d~onde optiques comprenant un polymère photovulcanisable supporté sur un substrat plastique, mais ils sont applicables à la fabrication de toute dispositif ou objet comprenant un polymère photovulcanisable supporté sur un substrat plastique.

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