Photonic device having an integral guide and method of...

Details Photonic device having an integral guide and method of... Photonic device having an integral guide and method of...

G - Physics

02

B

G02B 6/42 (2006.01)

Patent

CA 2336768

A process is provided for creating microstructure coupling guides for aligning photonic devices with optical signal carrying apparatuses. The process includes applying a photoresist to a semiconductor material, spinning the semiconductor material, baking the semiconductor material, exposing the photoresist, baking the semiconductor material a second time, and developing the resist. The process creates a microstructure that acts as an integral guide to align and maintain the relative position between an optical signal carrying apparatus and a photonic device.

L'invention concerne un procédé de création de guides d'accouplement de microstructures permettant d'aligner les dispositifs photoniques sur les appareils transportant des signaux optiques. Ce procédé consiste à appliquer une photorésine sur un matériau semi-conducteur, à faire tourner le matériau semi-conducteur, à faire cuire le matériau, à exposer la photorésine, à faire cuire le matériau une seconde fois et à développer la résine. Ce procédé permet de créer une microstructure servant de guide solidaire permettant d'aligner et de maintenir la position relative entre un appareil de transport de signaux optiques et un dispositif photonique.

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