Photoresist compositions containing quinone sensitizer

Details Photoresist compositions containing quinone sensitizer Photoresist compositions containing quinone sensitizer

G - Physics

03

F

96/150

G03F 7/004 (2006.01)

Patent

CA 1286532

PHOTORESIST COMPOSITIONS CONTAINING QUINONE SENSITIZER Abstract Positive-working imaging compositions comprise a polymeric binder and a quinone sensitizer which provides alkali solubility to the composition when exposed to activating radiation.

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