G - Physics – 03 – F
Patent
G - Physics
03
F
96/179, 96/252,
G03F 7/26 (2006.01) C08F 299/02 (2006.01) C08G 59/16 (2006.01) C08L 63/10 (2006.01) G03C 5/16 (2006.01) G03F 7/032 (2006.01)
Patent
CA 1114541
Abstract of the Disclosure A photosensitive coating composition useful in form- ing resist masks comprises reaction products of a mono- ethylenically unsaturated carboxylic acid and two differ- ent epoxy polymers; a polyethylenically unsaturated com- pound; and photoinitiator; and method of employing the same. One of said epoxy polymers has the general formula: Image The other of said epoxy polymers has the general formula: Image
313481
International Business Machines Corporation
Na
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