Photosensitive composition containing an ethylenically...

G - Physics – 03 – F

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96/155, 96/174

G03F 7/031 (2006.01) C08F 2/50 (2006.01)

Patent

CA 1125084

- 28 - Abstract Photosensitive composition containing an ethylenically unsaturated compound, initiator and sensitizer. A photosensitive composition of matter suited for the production of polymer resist images which composition comprises a mixture of : (1) a photopolymerizable ethylenically unsaturated com- pound, (2) at least one oxime ester photopolymerisation initia- tor, and (3) at least one sensitizer increasing the photopolyme- rization rate of said composition said sensitizer being defined in two general formulae said formulae including respectively a merocyanine dye, a zero- methine merocyanine dye, a carbostyril compound, an aryl-substituted 2-pyrazoline compound, an aryl- substituted oxazole compound, an aryl-substituted 1,2,4-triazole compound, an aryl-substituted 1,3,4- oxadiazole compound or an aryl-substituted-4-oxazo- lin-2-one compound. GV.1044

342916

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