Piezo-electric element and method of manufacturing such an...

Details Piezo-electric element and method of manufacturing such an... Piezo-electric element and method of manufacturing such an...

H - Electricity

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H01L 41/087 (2006.01) B06B 1/06 (2006.01) C04B 35/46 (2006.01) C04B 35/48 (2006.01) C04B 35/50 (2006.01) C04B 35/51 (2006.01) G01P 15/09 (2006.01) H01G 7/02 (2006.01)

Patent

CA 938380

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