Piezoelectric and electrostrictive actuators

Details Piezoelectric and electrostrictive actuators Piezoelectric and electrostrictive actuators

H - Electricity

01

L

H01L 41/09 (2006.01) H01L 41/083 (2006.01) H02N 2/00 (2006.01) H02N 2/02 (2006.01) H02N 2/04 (2006.01)

Patent

CA 2096119

An actuator (10) for tilting the plane of an object is constructed from a stack (16) of piezoelectric or electrostrictive mem bers (18). First alternate interstices between the members (18) are filled with a first conductive material (20), except that a first gap remains between the material (20) and one side (26) of the stack (16). Similarly, second alternate interstices between the members (18) are filled with a second conductive material (22), except that a second gap remains between the material (22) and an opposite side (24) of the stack (16). The first gap and the second gap have unequal depth into the stack (16). The first material (20) in the first interstices is coupled in common and the second material (22) in the second interstices is coupled in common. A voltage ap- plied between the first material (20) and the second material (22) will thereby cause the stack (16) to bend, thereby tilting the plane of the top (23) of the stack (16).

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