Piezoelectric pressure sensing apparatus for integrated...

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G - Physics

01

R

356/188

G01R 31/28 (2006.01) G01L 1/16 (2006.01) G01R 1/067 (2006.01) G01R 1/073 (2006.01)

Patent

CA 1251288

- 12 - PIEZOELECTRIC PRESSURE SENSING APPARATUS FOR INTEGRATED CIRCUIT TESTING STATIONS ABSTRACT OF THE DISCLOSURE A pressure sensing apparatus for use in an integrated circuit testing station is disclosed. The testing station includes a probe, a support structure, and lift means for moving an integrated circuit upward toward the probe. The invention specifically consists of a pressure pad secured to the support structure directly above the probe. The pad includes a resilient body portion having a rigid tip. Embedded within the pad is a piezoelectric element having electrical contact leads attached thereto. When the testing station is used, an integrated circuit is moved upward by the lift means toward the probe. As the circuit contacts the probe, it moves the probe upward. As the probe moves upward, it pushes on the pad, causing internal pressures to be generated therein. Such pressures are transmitted to the piezoelectric element which generates electrical impulses proportional to the pressures exerted on the pad.

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