Piezoelectric wafer mover

Details Piezoelectric wafer mover Piezoelectric wafer mover

G - Physics

05

D

356/200, 342/29

G05D 3/00 (2006.01) H01L 41/09 (2006.01)

Patent

CA 1115813

ABSTRACT OF THE DISCLOSURE Apparatus for effecting movement, translation and rotation, of an object relative to a reference, is disclosed, comprising transducer mean having a portion thereof fixed with respect to the reference and means frictionally coupling the transducer to the object for effecting movement thereof. In addition, means for applying a predetermined potential difference waveform to the transducer to accelerate the trans- ducer with respect to the object is disclosed. The transducer is accelerated at an acceleration which exceeds the critical acceleration of the object with respect to the transducer thereby effecting relative motion therebetween and thereby, being capable of moving the object significantly further than the extent of movement of the transducer.

338738

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