Piezoresistive strain concentrator

Details Piezoresistive strain concentrator Piezoresistive strain concentrator

G - Physics

01

L

G01L 9/16 (2006.01)

Patent

CA 2590407

A piezoresistive strain concentrator that converts mechanical movement into electrical output and a process for fabricating the concentrator are provided. The device includes a strain sensing structure composed of a piezoresistive strain sensitive element that spans a gap in a substrate. The strain sensing structure is supported on a strain concentrating structure also spanning the gap that has vertical walls extending to a cross-section at the base of the gap, both structures being etched from the substrate. The structure of the strain-concentrating support for the strain sensitive element is fabricated by deep reactive ion etch (DRIE). The strain sensing structure has an increased sensitivity, a low gage factor and an increased resistance to buckling and fracture compared to previous strain gage structures. Several of the strain sensing structures can be connected in a sequence in a bridge circuit.

Cette invention concerne un dispositif piézorésisitif de concentration de contraintes qui transforme un déplacement mécanique en une sortie électrique, et un procédé de fabrication d'un tel dispositif. Ledit dispositif comprend un élément piézorésisitif sensible aux contraintes qui enjambe un espace lacunaire dans un substrat. La structure de détection de contraintes repose sur une structure de concentration de contraintes qui enjambe elle aussi l'espace lacunaire avec parois verticales s'étendant transversalement à la base dudit espace, les deux structures étant gravées en partant du substrat. La structure du support de concentration de contraintes de l'élément sensible aux contraintes est fabriquée par gravure profonde aux ions réactifs (DRIE). Comparées aux anciennes structures de détection de contraintes, cette structure de détection de contraintes présente une sensibilité accrue, un faible coefficient de traction et une résistance accrue au voilage et aux fractures. Plusieurs structures de détection de contraintes peuvent être connectées en série dans un circuit de pont.

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