H - Electricity – 01 – L
Patent
H - Electricity
01
L
H01L 21/3065 (2006.01) B01L 3/02 (2006.01) B81C 1/00 (2006.01) G03F 7/36 (2006.01)
Patent
CA 2399197
A pin plate used to print a high density array printing of materials such as biological inks and a method for manufacturing the pin plate are described herein. The pin plate can be manufactured by coating a top surface of a silica wafer with a substantially thick layer of photoresist material. Next, a photolithography process is used to remove selected areas of the photoresist material from the silica wafer. Thereafter, a reactive ion etching process is used to form the pins in the silica wafer by etching away a predetermined amount of the top surface from the silica wafer that is not covered by the photoresist material. Afterwards, the remaining photoresist material is removed from the silica wafer which now resembles the pin plate.
Brady Michael Donovan
Custer Martha Blanche
Guermeur Celine Claude
Peterson Richard Curwood
Share Christine Marie
Corning Incorporated
Gowling Lafleur Henderson Llp
LandOfFree
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